About this Abstract |
Meeting |
2022 TMS Annual Meeting & Exhibition
|
Symposium
|
Electronic Packaging and Interconnections
|
Presentation Title |
Low-thermal-budget Hybrid Cu-Cu Bonding with Highly <111>-oriented Nanotwinned Cu and Polyimide |
Author(s) |
Pin-Syuan He, Kai-Cheng Shie, Chih Chen |
On-Site Speaker (Planned) |
Pin-Syuan He |
Abstract Scope |
In this study, highly <111>-oriented nanotwinned Cu (nt-Cu) was combined with polyimide (PI) to achieve the low thermal budget hybrid bonding (<250 ℃). We adopted three bonding scenarios to confirm the possibility of this approach: (A) PI-PI, (B) Cu/PI-PI, and (C) Cu/PI-nt-Cu bonding. For the PI-PI bonding, the imidization degree (DI) increased significantly and bonding interface was eliminated if the PI partial curing condition was 230 ℃ and below 0.3tfull curing. For the Cu/PI-PI bonding, the bonding interface of PI/PI was removed and an excellent adhesion between Cu pad and PI film was obtained. For the Cu/PI-nt-Cu bonding, we found an obvious gap between Cu pad and nt-Cu film due to Cu pad dishing and dome shape PI caused by hybrid structure co-planarization issue. Thus, to achieve the nt-Cu/PI hybrid bonding, we can predict the required Cu protrusion with the mismatch of Cu and PI in linear expansion coefficients. |
Proceedings Inclusion? |
Planned: |
Keywords |
Other, Other, Other |