About this Abstract |
Meeting |
2023 TMS Annual Meeting & Exhibition
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Symposium
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Phase Stability, Phase Transformations, and Reactive Phase Formation in Electronic Materials XXII
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Presentation Title |
Alternative Metal with Lower Resistivity than Cu: A First-principles Study |
Author(s) |
Tae Gon Ha, Youngmin Lee, Jungwoo Choi, Hyuck Mo Lee |
On-Site Speaker (Planned) |
Hyuck Mo Lee |
Abstract Scope |
This study finds an alternative metal to replace copper because its resistivity rapidly increases with a decreased feature size of semiconductors. For this purpose, the resistivity of eight different metals with a face-centered cubic structure has been calculated using DFT calculations and the Mayadas-Shatzkes model which quantifies the resistivity size effect. In the case of grain boundary with carbon, the cross-over between copper and rhodium occurs at 6.5nm. For oxygen impurity, the cross-over between two metals takes place at 14.8nm and it is 17.4nm for nitrogen while there is no cross-over for hydrogen. Rhodium seems a good candidate for a sub-6.5nm regime. |
Proceedings Inclusion? |
Planned: |
Keywords |
Electronic Materials, Computational Materials Science & Engineering, Modeling and Simulation |