About this Abstract |
| Meeting |
2023 TMS Annual Meeting & Exhibition
|
| Symposium
|
Phase Stability, Phase Transformations, and Reactive Phase Formation in Electronic Materials XXII
|
| Presentation Title |
Alternative Metal with Lower Resistivity than Cu: A First-principles Study |
| Author(s) |
Tae Gon Ha, Youngmin Lee, Jungwoo Choi, Hyuck Mo Lee |
| On-Site Speaker (Planned) |
Hyuck Mo Lee |
| Abstract Scope |
This study finds an alternative metal to replace copper because its resistivity rapidly increases with a decreased feature size of semiconductors. For this purpose, the resistivity of eight different metals with a face-centered cubic structure has been calculated using DFT calculations and the Mayadas-Shatzkes model which quantifies the resistivity size effect. In the case of grain boundary with carbon, the cross-over between copper and rhodium occurs at 6.5nm. For oxygen impurity, the cross-over between two metals takes place at 14.8nm and it is 17.4nm for nitrogen while there is no cross-over for hydrogen. Rhodium seems a good candidate for a sub-6.5nm regime. |
| Proceedings Inclusion? |
Planned: |
| Keywords |
Electronic Materials, Computational Materials Science & Engineering, Modeling and Simulation |