|About this Abstract
||2022 TMS Annual Meeting & Exhibition
||Phase Stability, Phase Transformations, and Reactive Phase Formation in Electronic Materials XXI
||Comparison of NiCo and NiP Electroplating for Wear Resistant Probe Tip
||Na-Young Kang, Jaeho Lee
|On-Site Speaker (Planned)
Probe card is one of reliability testing tool in semiconductor system. MEMS technology is used in MEMS probe tip fabrication. As the size of semiconductor is getting smaller, the size of probe tip is decreased. Since the reliability of probe is dependent on the physical property of probe tip, the hard and wear resistant material is used. NiCo and Ni-P are candidate materials for this purpose. Both NiCo and Ni-P are fabricated through electroplating method. The physical properties of NiCo and Ni-P plating is dependent on the composition of the coatings as well as plating property such as grain size and residual stress. In this study the effect of plating bath conditions on the NiCo and Ni-P electroplatings are investigated and compared. The surface hardness and crystallography of coating is measured and compared. The effects of additive on the properties and contents of the coating is finally optimized.