| About this Abstract |
| Meeting |
2024 TMS Annual Meeting & Exhibition
|
| Symposium
|
2D Materials – Preparation, Properties, Modeling & Applications
|
| Presentation Title |
Thermal Oxidation of Monolayer WS2 |
| Author(s) |
Ye Fan, Maryam Kazemzadeh-Atoufi, Ryo Mizuta, Stephan Hofmann, Peter W. Voorhees |
| On-Site Speaker (Planned) |
Peter W. Voorhees |
| Abstract Scope |
Many exciting properties and device concepts have been reported for the large family of layered 2D materials. However, the understanding of fundamental mechanisms for the stability and growth of these materials that can underpin scalable process technology is lagging far behind. We investigate the growth of corrosion pits in single-crystalline, monolayer domains of WS2 during thermal oxidation in-operando with an in-lens SEM detector. The corrosion reaction manifests itself via the nucleation and growth of etch pits. Using image processing algorithms to recognize and segment across ~103 images, it is possible to extract the nucleation and growth of thousands of individual pits at the nanoscale. We use a quantitative multi-phase field and analytical models to investigate the growth processes of the pits. These simulations lead to an understanding of the unique nucleation and growth mechanisms of the pits during the oxidation of 2D materials. |
| Proceedings Inclusion? |
Planned: |
| Keywords |
Electronic Materials, Modeling and Simulation, |