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Meeting 2024 TMS Annual Meeting & Exhibition
Symposium Recent Advances in Electron Back-Scattered Diffraction and Related Techniques
Presentation Title Cross-sectional Electron Channeling Contrast Imaging
Author(s) Julia Deitz, Timothy Ruggles, Andrew Polonsky, Luis Jauregui, Douglas Trotter
On-Site Speaker (Planned) Julia Deitz
Abstract Scope Electron Channeling Contrast Imaging (ECCI) performed in a scanning electron microscope (SEM) has been increasingly implemented as a rapid method for structural defect characterization in lattice mismatched semiconductor materials/devices. Much of this characterization has been performed in plan-view to access interfacial misfit dislocations. The ability to instead perform ECCI cross-sectionally would demonstrate the potential to achieve three-dimensional (3D) analysis of dislocation networks, giving more detail on dislocation-dislocation interactions. With increases in serial sectioning implementations in the focused ion beam SEM, automation routines are uniquely positioned to obtain these 3D dislocation network reconstructions. In this contribution, we highlight practical challenges to collecting this data and pathways forward. Sandia National Laboratories is a multi-mission laboratory managed and operated by National Technology and Engineering Solutions of Sandia, LLC., a wholly owned subsidiary of Honeywell International, Inc., for the U.S. Department of Energy’s National Nuclear Security Administration under contract DE-NA0003525.
Proceedings Inclusion? Planned:
Keywords Electronic Materials, Thin Films and Interfaces, Characterization


A Multi-generational Study of Detectors for Use in Cross-correlation-based EBSD: From Scintillators to Direct Detection
Accelerating Dictionary Indexing with Principal Component Analysis
Application of a Differential Evolution Optimization Algorithm on Deformation Extraction from EBSD Patterns
Applications of 3D EBSD for Understanding Complex Microstructures
Challenges and Prospects of TKD for Nanocrystalline Materials Characterization
Cross-sectional Electron Channeling Contrast Imaging
Enhanced SEM-based Electron Diffraction Analyses Using Intelligent Hybrid Pattern Matching
Exploring New Capabilities in Electron Backscattered Diffraction Using Direct Electron Detectors
Extraction of Defect Images by Post-processing of EBSD Patterns
Fast Forward Model Indexing: Theory and Application
Kikuchipy: An Open-Source Toolbox for Analysis of EBSD Patterns
Micro-analysis of δ-hydrides in Pure Zirconium by HR-EBSD and TKD
Microstructural Evolution Revealed by EBSD in Aluminum Alloys After Severe Plastic Deformation
Phase Differentiation in Half- and Full-Heusler Composites Using EBSD
Phase Distinction of Ordered Intermetallic Phases Using EBSD
Spherical Indexing Based on Dictionary Indexing Applied to Overlapping Pattern of Low-scattering Forsterite Due to Small Grain Sizes
The Use of NLPAR in the Analysis of Low Misorientation Gradients
Toward Correlative Grain Boundary Analysis in CIGS

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