|About this Abstract
||2023 TMS Annual Meeting & Exhibition
||Phase Stability, Phase Transformations, and Reactive Phase Formation in Electronic Materials XXII
||Competitive Degradation Mechanisms and Design Considerations for On-chip Resistor Structures
||Ping-Chuan Wang, Lina McCary, Rachmadian Wulandana
|On-Site Speaker (Planned)
Performance and reliability dictate the development of microelectronics technologies where the fabrication process has become extremely complicated while the demand for more aggressive operating condition remains insatiable. Often new device feature or harsher operating condition need to be implemented to a mature technology in order to maintain its technological competitiveness or apply to new application space without fundamental change in the materials and integration. It is critical to conduct thoughtful reassessment of the potential reliability implication beyond the original qualification. This presentation will provide some background and examples of such additional implication. In particular, the reliability study of a high-power on-chip silicide resistor will be used to illustrate how a requested current rating increase led to a holistic evaluation of the entire resistor structure comprising a silicide resistor stripe and its wiring interconnects. The design considerations in achieving such resistor structures meeting both performance and reliability will also be discussed.