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Meeting 2020 TMS Annual Meeting & Exhibition
Symposium Recent Developments in Biological, Structural and Functional Thin Films and Coatings
Presentation Title Tailoring optical and structural properties of metal-dielectric composite thin films
Author(s) Lirong Sun, John T Grant, John G Jones, Neil R Murphy, Jonathan P Vernon
On-Site Speaker (Planned) Lirong Sun
Abstract Scope The Ag-dielectric composite thin films were prepared in multi-layer stacks. A medium layer was done by simultaneously sputtering Ag and SiO2 targets using DC/pulse DC magnetron sputtering techniques in a pure Argon atmosphere and sandwiched between host material SiO2 (Al2O3). The stack was tailored by varying co-sputtering time and host material. The optical properties were studied in the wavelength of 200 – 2000 nm using complementary characterization techniques such as transmittance and reflectance UV-Vis-NIR spectrophotometer and spectroscopic ellipsometry. The results show that the co-sputtered Ag-SiO2 composite thin film coalescences faster and much uniform than a pure Ag film deposited at the same condition. The absorption peak of the films shifts towards longer wavelength and reflectance increases in the NIR and IR regions with increasing silver content. The optical properties were further correlated to the chemical composition, crystalline structure, film density and surface morphology by XPS, XRD, XRR and SEM measurements.
Proceedings Inclusion? Planned: Supplemental Proceedings volume

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