About this Abstract |
Meeting |
2020 TMS Annual Meeting & Exhibition
|
Symposium
|
Recent Developments in Biological, Structural and Functional Thin Films and Coatings
|
Presentation Title |
Structure, Morphology and Electrical Properties of Nanocrystalline Niobium Films |
Author(s) |
Nivedita Lalitha Raveendran, Avery Haubert, Ramana Chintalapalle |
On-Site Speaker (Planned) |
Avery Haubert |
Abstract Scope |
Niobium (Nb) thin films are widely known for their potential industrial and engineering applications in solar cells, buffer/contact layers in electronics and superconducting devices. In this work, we report on the structure, morphology and electrical properties of Nb thin films made by rf magnetron sputtering. Nb thin films were fabricated on Si (100) with varying substrate temperatures (RT-700oC) and deposition pressures (3-25 mtorr). The effect of processing conditions was significant on the structure and properties of Nb films. The films deposited at higher substrate temperature and lower pressure exhibited higher degree of crystallinity and electrical conductance. The results will be presented and discussed to establish a correlation between processing conditions, structure and electrical characteristics of nanocrystalline Nb films. |
Proceedings Inclusion? |
Planned: Supplemental Proceedings volume |