|About this Abstract
||2020 TMS Annual Meeting & Exhibition
||Recent Developments in Biological, Structural and Functional Thin Films and Coatings
||Pulsed-Laser Deposition and Characterization of β-Ga2O3 Thin Films
||Vishal Zade, Mallesham Bandi, Ramana Chintalapalle
|On-Site Speaker (Planned)
β-Ga2O3 is a fascinating material for application in field effect transistors, switching memories, high temperature gas sensors, photocatalysts, deep-UV photodetector and transparent conducting electrodes. However, fabricating device quality thin films and understanding the structure-property relationship is quite important to exploit β-Ga2O3 into device applications. In this context, the present work was performed to deposit polycrystalline Ga-oxide films by pulsed-laser deposition and characterize them to understand the structure-property correlation. β-Ga2O3 films were fabricated under variable conditions and the effect of processing conditions on the crystal structure, morphology and optical properties has been studied in detail. A more detailed account of structure, growth behavior and optical properties of β-Ga2O3 will be presented and discussed.
||Planned: Supplemental Proceedings volume