About this Abstract |
Meeting |
6th International Congress on 3D Materials Science (3DMS 2022)
|
Symposium
|
6th International Congress on 3D Materials Science (3DMS 2022)
|
Presentation Title |
Correlative Microscopy: 3D EBSD with fs-Laser Plasma FIB-SEM |
Author(s) |
Bartlomiej Winiarski, Remco Geurts |
On-Site Speaker (Planned) |
Bartlomiej Winiarski |
Abstract Scope |
Multi-scale and multi-modal correlative microscopy methods, which involve the coordinated characterization of materials across a range of length scales using various apparatus, allowing solving a broad range of scientific problems previously unreachable by the typical experimental operando. The advent of FIB-SEM allowed for automated serial sectioning tomography, 3D-EDS and 3D-EBSD of material volumes ≤ 40 × 40 × 40 µm3. Plasma FIB-SEM (PFIB-SEM) expanded these techniques to volume ~ 250 × 250 × 250 µm3 keeping the voxels sizes in the dozens of nm-ranges. Recently, femtosecond Laser PFIB-SEM pushed these 3D techniques further to mm-scale volumes, setting the standards for multi-modal data collection from nm to mm scales.
In this work we address current developments in 3D EBSD with Laser PFIB-SEM and in the framework of correlative microscopy. We discuss the effects of ultra-short pulse laser ablation on the EBSD results and we present various practical examples. |
Proceedings Inclusion? |
Definite: Other |