Surface modification (patterning& chemical structure) can control the interface interactions between cells and the surface of implantable materials. Functionality of tissues and their alignment have benefited efforts in their repair and regeneration, especially for neuromuscular disorders. Structural materials can promote the axons and myoblasts alignment and yield healthy functional tissues. Here, we offer an alternative approach that propose the use of specific surface chemical coatings of Silicon Oxynitride (SiONx) with two different surface coordinations (RBM: tetrahedral, and RMM: tetrahedral & trigonal) to enhance myogenesis and neurogenesis. Micropatterned scaffolds were developed on Si-wafer using photolithography, then 200 nm layer of SiONx was deposited by Plasma Enhanced Chemical Vapor Deposition (PECVD) technique. C2C12 myoblast and NG-108 neuroblast cell lines were used for the in-vitro studies. Results of surface characterization (FTIR, XRD, XANES, AFM, SEM, and Surface energy) and in-vitro cell culture (Cell growth, alignment, and differentiation) will be presented.