About this Abstract |
| Meeting |
2026 TMS Annual Meeting & Exhibition
|
| Symposium
|
Phase Stability, Phase Transformations, and Reactive Phase Formation in Electronic Materials XXV
|
| Presentation Title |
Evaluations of TiN/Si3N4 Interface Structure Using TEM and DFT Analyses |
| Author(s) |
Hiroaki Tatsumi, Shunya Nitta, Atsushi M. Ito, Arimichi Takayama, Makoto Takahashi, Seongjae Moon, Eiki Tsushima, Hiroshi Nishikawa |
| On-Site Speaker (Planned) |
Hiroaki Tatsumi |
| Abstract Scope |
For insulated circuit substrates in power modules, we investigate the diffusion bonding of Cu to Si3N4 using a TiN interlayer. We evaluated the atomic structure of the TiN/Si3N4 interface using a combination of transmission electron microscopy (TEM) and density functional theory (DFT). TEM analysis identified five distinct orientation relationships, all exhibiting small lattice misfits. DFT calculations confirmed these interfaces are thermodynamically stable. In this presentation, we will discuss the structural stability of the interface by integrating our experimental and computational results. |
| Proceedings Inclusion? |
Planned: |
| Keywords |
Joining, Computational Materials Science & Engineering, Ceramics |