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Meeting 2024 TMS Annual Meeting & Exhibition
Symposium Advanced Functional and Structural Thin Films and Coatings
Presentation Title Nanocrystalline Diamond for MEMS/NEMS Applications
Author(s) Ashok Kumar
On-Site Speaker (Planned) Ashok Kumar
Abstract Scope Diamond coating materials offer several advantages over conventional materials currently being explored for such applications, particularly, over Si alternative as MEMS materials. Fabrication of diamond-MEMS components using conventional CVD processes results in microcrystalline diamond coatings with coarse grains (≥ 1 Ám) and rough surfaces (rms ~0.5-1m). Nano crystalline diamond (NCD) coatings with 5-15 nm grains and smooth surface (15-30 nm rms) can provide a unique combination of excellent mechanical, tribological, chemical, electrical and biocompatible properties. The NCD films were grown on Si substrates by microwave plasma enhanced chemical vapor deposition (MPECVD) method. Parameters such as gas composition, temperature, and pressure had been optimized to prepare the best quality thin films. Scanning electron microscopy (SEM), Raman spectroscopy, A discussion will be presented on the fundamental and applied science done on NCD and microfabrication processes and characterization of mechanical, tribological, electronic transport, and bio-compatible properties.
Proceedings Inclusion? Planned:
Keywords Electronic Materials, Thin Films and Interfaces, Ceramics

OTHER PAPERS PLANNED FOR THIS SYMPOSIUM

A-3: Beyond Traditional Engineering: the Use of Suspension Plasma Spray Technology in the Formation of Metal Oxide Nanoparticle-based Bioactive Coatings
A-4: Composition Dependence of Electrical Properties in CrxMn1-xTe Thin Film
A-5: The Influence of Chromium Content on Resistance Changes as a Function of Strain in Cr2Ge2Te6 Thin Film
An Investigation of Chromium Oxide Growth with Ru as a Diffusion Barrier
Characterization of Additive Manufactured AlCoCrFeNiCu and AlCoCrFeNiTi High Entropy Alloys by Cyclic Voltammetry
Covering Open ZnMg Structures by Polymers for Adapting the Corrosion Rate in Absorbable Tissues
CrSi Protective Coatings for Thermoelectric Materials against High-temperature Oxidation
Diamond Epitaxy Using Nickel to Facilitate Epitaxy with Q-carbon as the Seed Layer
Effect of Ag on TiO2 Thin Films Prepared via Sol-gel Proces
Enhanced Bandgap Emission from Czochralski Silicon by Gate Oxide and Spin-coated Silica Coatings
Enhanced Structural and Optical Quality of Rutile-phase Controlled GeO2 Epitaxial Films on MgO(100) for Application in Optoelectronics
Fluorescent Multi-layer Europium-doped Coatings Created using Ion Assisted Deposition
Forming of Open Structured Zn1.5Mg Coated with Polymers for Absorbable Tissues
Functionalization Strategies for Rubber Seed Oil-based Thin Films: A Critical Review
Influence of Alloying Agents on the Biodegradability of Zinc
Molecular Beam Epitaxy of Binary and Ternary Manganese and Chromium Nitrides
Multiphysics Modelling of AlScN Film Growth for Mems and Memory Applications
Nanocrystalline Diamond for MEMS/NEMS Applications
NiCo2O4/Graphene Quantum Dots as Advanced Electrodes for High Efficiency Asymmetric and Symmetric Supercapacitors
Self-organized Nanostructured Bonds through Transient Liquid Phase Bonding
Steep Temperature-dependent Permittivity in BCZT Thin Films for Capacitive Thermoelectric Converter Application
Study of Binary Layer Ceramic Coating of Zirconium Nitride and Molybdenum Di-Selenide Deposited on Aluminium Composite Substrate
Synthesis of Carbon Based Cost-effective Conductive Ink and Fabrication of Degradable Screen Printed Electrode Thereof
Toward the Development of Densors and Actuators by 4D Printing

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