| Abstract Scope |
Diamond coating materials offer several advantages over conventional materials currently being explored for such applications, particularly, over Si alternative as MEMS materials. Fabrication of diamond-MEMS components using conventional CVD processes results in microcrystalline diamond coatings with coarse grains (≥ 1 µm) and rough surfaces (rms ~0.5-1m). Nano crystalline diamond (NCD) coatings with 5-15 nm grains and smooth surface (15-30 nm rms) can provide a unique combination of excellent mechanical, tribological, chemical, electrical and biocompatible properties. The NCD films were grown on Si substrates by microwave plasma enhanced chemical vapor deposition (MPECVD) method. Parameters such as gas composition, temperature, and pressure had been optimized to prepare the best quality thin films. Scanning electron microscopy (SEM), Raman spectroscopy, A discussion will be presented on the fundamental and applied science done on NCD and microfabrication processes and characterization of mechanical, tribological, electronic transport, and bio-compatible properties. |