| About this Abstract |
| Meeting |
2024 TMS Annual Meeting & Exhibition
|
| Symposium
|
Phase Stability, Phase Transformations, and Reactive Phase Formation in Electronic Materials XXIII
|
| Presentation Title |
The Effect of Nitrogen on Thermomechanical Behavior during the β-α Phase Transformation in W Thin Films |
| Author(s) |
Yue Zhao, Hannah Elizabeth Morgan-Smith Myers, Shefford P. Baker |
| On-Site Speaker (Planned) |
Shefford P. Baker |
| Abstract Scope |
The β phase (A15) in tungsten thin films is metastable and irreversibly transforms to the stable α phase (BCC) upon thermal annealing. β-W has unique properties including a giant spin Hall effect which is of great interest for use in spintronic memory devices. For such applications, the stability of the β phase during processing and use must be understood. We sputtered W films with different nitrogen contents onto Si substrates and measured curvature to determine stress as a function of temperature during cycles up to 900℃ in vacuum. A difference in density leads to large (~GPa) increases in tensile stress during the β to α phase transformation, making this a sensitive in-situ probe of that transformation. Increasing nitrogen concentration inhibits the phase transformation, resulting in higher initiation and completion temperatures, and leads to larger stress changes. Additional stress changes were correlated with microstructure changes characterized using XRD, SEM and EBSD. |
| Proceedings Inclusion? |
Planned: |
| Keywords |
Thin Films and Interfaces, Phase Transformations, Other |