| About this Abstract |
| Meeting |
2024 TMS Annual Meeting & Exhibition
|
| Symposium
|
Advances in Surface Engineering VI
|
| Presentation Title |
Magnetic-guided Physical Vapor Deposition for Direct Deposition of Chromium-Nitrogen Films With Uniaxial and Biaxial Crystal Alignment |
| Author(s) |
Santiago Vargas, Camilo Bedoya Lopez, Diana S Galeano, Carlos E Castano |
| On-Site Speaker (Planned) |
Camilo Bedoya Lopez |
| Abstract Scope |
A magnetic field applied to the substrate side of a magnetron sputtering system is used to alter the deposition flux and crystal structure of CrNx films. This sputtering modification enables a direct deposition method, promising advances for the next generation of manufacturing for nano- and microdevices. The system described in this work leads to selective deposition rates across the deposition surface and engineering of crystal structures. Two magnetic profiles have been implemented for this work: focused deposition and dispersive deposition. The former produced a mount deposition at the axis of the equipment with an out-of-the-plane crystal texture confirmed by electron microscopy and X-Ray diffraction. The latter produced CrNx films with a biaxial crystal alignment correlated with the magnetic field profile. Furthermore, an extensive discussion around the sputtered dynamic in this unique deposition system is accompanied by an electrostatic probe and optical emission spectroscopy measurements of the plasma speciation during deposition. |
| Proceedings Inclusion? |
Planned: |
| Keywords |
Nanotechnology, Thin Films and Interfaces, Surface Modification and Coatings |