About this Abstract |
Meeting |
2024 TMS Annual Meeting & Exhibition
|
Symposium
|
Chemistry and Physics of Interfaces
|
Presentation Title |
Energetic, Focused, Beam-induced Surface Chemistry: A Nanofabrication Perspective |
Author(s) |
Steven Randolph, John Lasseter, Spencer Gellerup, Nickolay Lavrik, Ivan Kravchenko, Philip Rack |
On-Site Speaker (Planned) |
Steven Randolph |
Abstract Scope |
Modern materials science for electronics and optoelectronics is increasingly embracing more exotic structures such as two-dimensional van der Waals systems, topological materials, and single photon emitting color centers. With few exceptions, the properties of these materials are highly influenced by fabrication processes employed to integrate them into functional architectures. As such, direct-write nanofabrication processes that minimize processing steps are well-suited to be leveraged for dimensional and chemical manipulation of these materials/surfaces, creation of new interfaces, and purposeful introduction of functional defects. Here, we present an introduction and overview of focused electron, ion, and laser induced surface chemistry and physics relevant to these newer classes of materials. Emphasis will be placed on beam-induced adsorbate/substrate chemical interactions as well as chemical changes at surfaces induced by ion bombardment. The application of these phenomena to create new surface and interface properties will be discussed in the context of nanofabrication of functional devices. |
Proceedings Inclusion? |
Planned: |
Keywords |
Thin Films and Interfaces, Electronic Materials, Nanotechnology |