About this Abstract |
Meeting |
TMS Specialty Congress 2024
|
Symposium
|
2nd World Congress on Artificial Intelligence in Materials & Manufacturing (AIM 2024)
|
Presentation Title |
Predicting Microstructure From Process Conditions Using Multi-modal Machine Learning |
Author(s) |
Ankit Shrivastava, Matias Kalaswad, Marta D’Elia, Dave Adams, Habib Najm |
On-Site Speaker (Planned) |
Ankit Shrivastava |
Abstract Scope |
We present a multimodal machine learning (ML) approach to build a process-structure mapping for molybdenum (Mo) thin films fabricated using physical vapor deposition (PVD). Optimizing thin films for semiconductor applications involves navigating many process conditions, making the approach inefficient. Data science models offer a more cost-effective solution. However, microstructure information comes from different sources of experiments in the form of multimodal datasets, for example, stress measurements, X-ray diffractograms, and scanning electron microscopy images. Predicting joint multimodal information of microstructure is a challenge. Our multimodal ML approach predicts joint structural information of microstructures from PVD process conditions. The construction employs multiple dimensional reduction algorithms to learn a joint latent representation of the multimodal microstructure data. Then, a deep learning model is used to learn the relationship between joint latent representation and process conditions. This approach can enhance our understanding of the complex interplay between process parameters and microstructure properties. |
Proceedings Inclusion? |
Definite: Other |