|About this Abstract
||2021 TMS Annual Meeting & Exhibition
||Characterization of Minerals, Metals and Materials 2021
||The Study of Structure-mechanical Properties Relationship in Different Cross-linked SU-8 Thermoset Polymers
||Prakash Sarkar, Prita Pant, Hemant Nanavati
|On-Site Speaker (Planned)
SU-8 is a cross-linked thermoset amorphous polymer, which is involved to design micro-electrical mechanical system (MEMs) components. We are interested to measure elastic modulus (Er) and hardness (H) of different cross-linked SU-8. To study this, we have fabricated samples by following standard photolithography process. The amount of cross-linking is estimated by Fourier-transform infrared spectroscopy (FTIR). Nanoindentation experiments are performed to measure Er and H values at 800μN maximum load. By following conventional method, high Er and H values are obtained for less cross-linked samples and vice-versa. The main reasons are adhesion between the tip surface and contact sample surface, viscoelasticity and wrong measurement of contact area (Ac). After minimization of adhesion effect and viscoelasticity, we have considered Ac as residual area obtained from scanning probe microscopy (SPM). Thereafter, for less (~82%) and high (~95%) cross-linked samples, obtained Er is 4.61±0.13GPa and 5.02±0.18GPa, and H is 256.97±1.42MPa and 285.48±1.17MPa respectively.