| About this Abstract |
| Meeting |
2022 TMS Annual Meeting & Exhibition
|
| Symposium
|
Advances and Discoveries in Non-equilibrium Driven Nanomaterials and Thin Films
|
| Presentation Title |
ALD Deposited Functional Hetero-nano Structured Ceria Films |
| Author(s) |
Sudipta Seal, Udit Kumar, Corbin Feit, S. Novia Berriel, Ayush Arunachalam, Kanad Basu, Parag Banerjee |
| On-Site Speaker (Planned) |
Sudipta Seal |
| Abstract Scope |
Atomic layer deposition is a versatile technique to deposit atomically precision thin films. It is an important manufacturing tool to control and engineer surface properties in 2-D nanomaterials, more precisely thickness-dependent chemistries.. Herein, we present a unique way of engineering defects in ALD nano structured cerium oxide films (CNP). Recently, CNPs has found a wide range of applications from biomedical to electronics. We present a novel method to optimize ALD ceria thin films and precisely control the properties in real-time by utilizing in-situ ellipsometry and machine learning algorithms. An extensive high-resolution X-Ray Photoelectron Spectroscopy (HRXPS) study of thin films reveals the mixed valency of Ce 4f and is correlated to defect concentration and layer thickness in nanoscale. Dual oxidation states in CNP is important for regenerative properties in various biomedical intervention. We also extended the study to fabricate plasmonic hetero nano gold nanorods (AuNR)-CNP architectures. |
| Proceedings Inclusion? |
Planned: |
| Keywords |
Ceramics, Machine Learning, Nanotechnology |