| About this Abstract |
| Meeting |
2022 TMS Annual Meeting & Exhibition
|
| Symposium
|
Advances and Discoveries in Non-equilibrium Driven Nanomaterials and Thin Films
|
| Presentation Title |
Meta-stable Orthorhombic Phase of HfZrOx Thin Films for Ferroelectric Devices |
| Author(s) |
Jiyoung Kim |
| On-Site Speaker (Planned) |
Jiyoung Kim |
| Abstract Scope |
Hf based oxides have several phases, such as monoclinic (thermodynamically stable phase at room temperature and 1 atm), tetragonal, cubic and orthorhombic. Recently, ferroelectric characteristics was discovered in Hf based oxide thin films with meta-stable noncentrosymmetric orthorhombic phase (space group: Pbc21). Because of Si process compatibility of Hf oxide, derivatives of Hf oxide have been extensively investigated for ferroelectric device applications. In this presentation, phase transformation to meta-stable orthorhombic phases from as-deposited amorphous thin films will be discussed along with their ferroelectric characteristics. |
| Proceedings Inclusion? |
Planned: |
| Keywords |
Electronic Materials, Phase Transformations, Thin Films and Interfaces |