About this Abstract |
| Meeting |
2022 TMS Annual Meeting & Exhibition
|
| Symposium
|
Alloys and Compounds for Thermoelectric and Solar Cell Applications X
|
| Presentation Title |
Integration of Si-based Micro Thermoelectric Generator Devices |
| Author(s) |
Takanobu Watanabe |
| On-Site Speaker (Planned) |
Takanobu Watanabe |
| Abstract Scope |
We pursued the optimal design of large-scale integration of micro thermoelectric power generators and developed fabrication processes for the integrated module. We are proposing a new thermoelectric device architecture using Si nanowire thermoelement, which was patterned by top-down lithography of SOI substrates without forming a cavity space underneath it. The simple device structure allows us to enhance the power generation capacity by miniaturizing each element together with the high-density integration. We investigated the optimal width ratio of n-type and p-type legs in the bileg module, and demonstrated multi-stage thermoelectric modules of unileg and bileg architectures. |
| Proceedings Inclusion? |
Planned: |
| Keywords |
Energy Conversion and Storage, Modeling and Simulation, Nanotechnology |