About this Abstract |
Meeting |
2022 TMS Annual Meeting & Exhibition
|
Symposium
|
Alloys and Compounds for Thermoelectric and Solar Cell Applications X
|
Presentation Title |
Planar-type Nano Phononic Si Energy Harvesters |
Author(s) |
Masahiro Nomura |
On-Site Speaker (Planned) |
Masahiro Nomura |
Abstract Scope |
Thermoelectric performance of planar-type uni-leg poly-Si energy harvesters will be presented. The device was fabricated using an SOI wafer with a 300-nm-thick n-doped Si with periodic circular holes to enhance the ZT value by reducing thermal conductivity. The output power density was enhanced by a factor of 10 by the phononic patterning, and showed 3 micro Watt per square centimeter with 1 K difference. We demonstrate that thermal design of the device is significantly important to maximize the device performance. |
Proceedings Inclusion? |
Planned: |
Keywords |
Energy Conversion and Storage, Thin Films and Interfaces, Nanotechnology |