About this Abstract |
| Meeting |
2022 TMS Annual Meeting & Exhibition
|
| Symposium
|
Alloys and Compounds for Thermoelectric and Solar Cell Applications X
|
| Presentation Title |
Planar-type Nano Phononic Si Energy Harvesters |
| Author(s) |
Masahiro Nomura |
| On-Site Speaker (Planned) |
Masahiro Nomura |
| Abstract Scope |
Thermoelectric performance of planar-type uni-leg poly-Si energy harvesters will be presented. The device was fabricated using an SOI wafer with a 300-nm-thick n-doped Si with periodic circular holes to enhance the ZT value by reducing thermal conductivity. The output power density was enhanced by a factor of 10 by the phononic patterning, and showed 3 micro Watt per square centimeter with 1 K difference. We demonstrate that thermal design of the device is significantly important to maximize the device performance. |
| Proceedings Inclusion? |
Planned: |
| Keywords |
Energy Conversion and Storage, Thin Films and Interfaces, Nanotechnology |