Using Cantor alloy and Ti targets, (CoCrFeNiMn)1-x-Tix (x = 0, 4, 12, 24 in at. %) high-entropy thin films were deposited by pulsed direct current magnetron sputtering on silicon wafers. The effect of Ti content on microstructure, mechanical and tribological properties were studied. Within the variation of Ti content, all films showed a columnar structure, but with increasing Ti content there was a trend from FCC crystalline structure (0 at. % Ti) to nearly amorphous (24 at. % Ti). Using nanoindentation, film hardness (H) and reduced elastic modulus (Er) were measured. The highest H/Er and H3/Er2 values, potential indicators of wear resistance, were found with the minor addition of Ti. The tribological properties of the (CoCrFeNiMn)1-x-Tix films were evaluated by the micro-tribological test. The friction and wear behavior of the films were revealed, and the wear mechanism will be discussed.