ProgramMaster Logo
Conference Tools for MS&T23: Materials Science & Technology
Login
Register as a New User
Help
Submit An Abstract
Propose A Symposium
Presenter/Author Tools
Organizer/Editor Tools
About this Abstract
Meeting MS&T23: Materials Science & Technology
Symposium Late News Poster Session
Presentation Title L-9: Atomic Layer Deposition of MoOx Thin Films Using Mo(iPrCp)2H2 and O3
Author(s) Ethan L. Hendrix, Ben M. Garland, Vamseedhara Vemuri, Nicholas Strandwitz
On-Site Speaker (Planned) Ethan L. Hendrix
Abstract Scope This work studied the growth of molybdenum oxide thin films with thermal atomic layer deposition (ALD) using Mo(iPrCp)2H2 and O3 as precursors. Growth parameters were determined by varying growth temperature and precursor dose times. ALD growth was exhibited in a temperature range of 100-200 C. The growth per cycle (GPC) ranged from 1.3-1.7 /cycle with a standard uniformity parameter (SUP) of <5%. Attempts to grow films using H2O as an oxygen source showed no significant growth. Film properties were measured using spectroscopic ellipsometry, x-ray reflectivity, x-ray diffraction, x-ray photoelectron spectroscopy, and infrared spectroscopy.

OTHER PAPERS PLANNED FOR THIS SYMPOSIUM

A-15: Additive Manufacturing in High Performance Thermal Systems
A-16: Exploring Rapid Prototyping for Studio Ceramics Based on Indirect 3D Printing Technique
A-17: In Situ Residual Stress Measurements for 9Cr1Mo (Gr 91) Stainless Steel Using Ultrasound
A-18: Microstructure and Mechanical Properties of STS316L and P21 Tool Steel Laser Laminated Functionally Graded Materials
A-19: Modifying the Energy Density Formula: Uncovering Fundamental L-PBF Material Differences
A-20: Thermally Dynamic Ripening Induced Multi-modal Precipitation Strengthened NiTi Shape Memory Alloys by LENS
A-21: Towards Metal Additive Manufacturing Using Alternate Powders
B-3: Characterization of Cements and Concretes Using 3D Automated Quantitative Mineralogy and Enhanced Deep-learning Reconstruction via X-ray Microscopy
B-4: The Effects of Physical Constraints on Deep-learning Based Surrogate Models
D-21: Designing Novel Dielectric Composites with High Thermal Conductivity via Cold Sintering
D-22: Oxygen Exchange-mediated Behaviors in Ferrite Perovskite Oxides: Crystallization and a Photo-ionic Effect
D-23: Processing and Properties of Thin Solution-based Sb2Se3 Thin Films for Phase Change Materials
D-24: Structural Rearrangements during Relaxation of Lithium Disilicate Glass
D-25: Surface Energy Measurements of Yttrium Oxide
D-26: Synthesis of Spinel-type High-entropy Oxides for the Development of Light-element-containing Multication Magnetic Materials
F-14: Calculation of Stress Intensity Factors for a Multiple Crack-hole Interaction Problem
F-15: Capacitive Discharge in Flash Experiments under Air and Ar Atmosphere
F-16: Deformation and Fracture Response of Single-crystal MAX Phases
F-17: Existence of Single Crystal Structure in Congruent Melting Intermetallic Compound – Ni5Ge3
F-18: Novel Techniques in X-ray Nanotomography and High Resolution FESEM Imaging: Linking Structure and Properties of Heterogeneous and Automotive Catalysts in 2D and 3D
G-12: Characteristic Deformation Behavior of Heterogeneous-Nano structured SUS316LN Autenitic Stainless Steel at a Cryogenic Temperature
G-13: Development and Characterization of a Cast Steel Reinforced with Primary Carbides for High Strength and Severe Wear Applications
J-10: Assessing Wear Rate Based on Cutting Power Measurement
K-6: Microstructure Based Modeling Approach for the Fatigue Life Prediction of Hypo-eutectoid Steels
K-7: Numerical Analysis on the Local Deformation Behavior of the Fir Tree of Ni-based Superalloy Turbine Blade
L-10: Boron-based Nanomaterials for Advancing Boron Neutron Capture Therapy: Synthesis, Characterization, and Impressive Anti-tumor Outcomes
L-11: Development of an Antibacterial Nanocomposite Film from Cocoa Residues
L-12: Investigating Na+ ion Storage Behavior of WS2NT Encapsulated SiOC Fibers
L-13: Laser-induced PVD Coatings - A New Method to Fabricate Thin Layers that Show the Properties of Free Nanoparticles
L-14: Manufacturing and Characterization of Ferromagnetic Nano-clusters in Si by One-step Diffusion for Microfluidic Based CTC Separation System
L-15: Regulating Na+ and K+ Ion Storage into TMD Alloys: Effect of Upper Voltage Cut-off Technique
L-9: Atomic Layer Deposition of MoOx Thin Films Using Mo(iPrCp)2H2 and O3
N-10: Effect of Laser Welding on Corrosion and Microstructure in Underwater Environment
N-11: Microstructure Evolution of Al-Cu-Li Alloy during Electrically-assisted Thermomechanical Treatment
N-12: Powder Metallurgy of Electrical Contacts
N-9: Correlation between the Laser Beam Shape and the Weldability of Thin Stainless Steel Plates
O-12: A High-Performance Li-Ion Battery Based on Polymer-Derived Silicon-Oxycarbide/Graphene Nanoplatelets Composites
O-13: Permeation of Carbon Dioxide in Tungsten-doped Lanthanum Molybdenum Oxide/Lithium-Sodium-Potassium Carbonates Dual Composite Ceramic Membranes

Questions about ProgramMaster? Contact programming@programmaster.org