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Meeting MS&T23: Materials Science & Technology
Symposium Advanced Materials for Harsh Environments
Presentation Title Cold-rolled 3D Graphene Sheets as a Protective Material in the Fluorocarbon Plasma Environment
Author(s) Vamsi Krishna Reddy Kondapalli, Kyle Brittingham, Guangqi Zhang, Mahnoosh Khosravifar, Vesselin Shanov
On-Site Speaker (Planned) Vamsi Krishna Reddy Kondapalli
Abstract Scope Processing of electronic components in a fluorocarbon plasma environment causes deteriorating corrosion of the dry etch chambers. Ceramics like SiO2 and Al2O3 offer high corrosion resistance and chemical stability. However, their interaction with ionized fluorocarbon gases causes chamber contamination due to erosion and particle generation. Here we propose cold-rolled 3D graphene as an alternative reusable protective material to prevent corrosion of silicon and SiO2 surfaces used in dry etching equipment. 3D graphene (3DG) synthesized via Chemical Vapor Deposition (CVD) is scalable and can be processed into various shapes and sizes. The high surface area and internal porosity of 3DG affect its etch resistance, whereas cold rolling suppresses the porosity and increases the gravimetric density by 37.3 times. Cold-rolled 3DG sheets demonstrated significantly higher etch selectivity to silicon/ SiO2 in comparison to that of pristine 3DG when exposed to a CF4 plasma environment at 100W and 300W power.


Behavior of Select Refractories in Plastics Gasification Environments
Blue Phase Liquid Crystal Templated Nucleation and Growth of Inorganic Materials
Castable Eutectic Ni-Ce Superalloys Strengthened by a γ/γʹ Microstructure
Ceramic Far-Field Passive Wireless Sensors for High Temperature Measurement
Coarsening and Globularization in Eutectic Ni-Ce Alloys
Cold-rolled 3D Graphene Sheets as a Protective Material in the Fluorocarbon Plasma Environment
Corrosion Phenomena in Additively Manufactured Aluminum Alloys Containing Quasicrystalline Dispersoids
Crack Tip pH Measurements in Al-Cu-Mg and Al-Zn-Mg Alloys to Understand Differences In Corrosion Fatigue Behavior
Doped Lanthanum Chromite-refractory Based Composites Sensors for High Temperature Monitoring in Harsh Environments Systems
Effect of Heat Treatment on Grain Boundary Characteristics and Intergranular Creep Resistance of IN740H and It's Variant
Effect of Laser Surface Treatment on the Corrosion and Fatigue Performance of AA5456-H116 Alloys
J-3: Material Properties of High-strength High Chromium TWIP Steels with Increased Corrosion Resistance
J-4: Metal-coated Halloysite Nanotube-Based Antimicrobial Filtration System for Space Mission Applications
Microstructure and Mechanical Properties of Molded Martian and Lunar Regolith Compressed Pellet Samples
Performance of High Z and High-density Multifunctional Materials in Harsh Environments
Smart Phase Transforming Metal Ceramic Multilayers
Understanding SCC Resistance and Failure in AF96 Welded Joints
Virtual Characterization Tools for Understanding Material Response in Harsh Conditions

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