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Meeting MS&T23: Materials Science & Technology
Symposium Grain Boundaries, Interfaces, and Surfaces: Fundamental Structure-Property-Performance Relationships
Presentation Title Modeling SiN Crystallization in Microelectronics Manufacturing Using Phase-field Method
Author(s) Aashique Alam Rezwan, Jennie Podlevsky, Calvin Parkin, Khalid Hattar, James Matthew D. Lane, Tesia Janicki, Scott Grutzik, Edwin Chiu, Chris Bishop, Hojun Lim
On-Site Speaker (Planned) Aashique Alam Rezwan
Abstract Scope Silicon Nitride (SiN) has a wide range of applications as a structural material in integrated microelectronics, micro-optoelectronics and micromechanical systems. This thin film is fabricated in common microelectronics film stacks on silicon using low pressure chemical vapor deposition (LPCVD). In the presence of phosphorous dopants and other surface imperfections, anomalous SiN crystallization is observed which poses undesirable electrical properties. We have modeled the crystallization phenomena of 𝛂-SiN phases using an orientation-field based phase-field model with growth front nucleation and interface anisotropy to characterize the anomalous SiN crystallization. Predicted spherulitic patterns of the 𝛂-SiN induced by misorientation dependent grain boundary energy is validated using experimental observation whereas interfacial energies are calculated using molecular dynamic simulations. The predictive capabilities enabled by this work can be used during the design phase of microelectronics development. SNL is managed and operated by NTESS under DOE NNSA contract DE-NA0003525.


A Molecular Dynamics Based Atomistic-scale Study to Investigate Mechanical Properties of Σ3 Incoherent Non-Arrhenius Grain Boundary
A Potential Mechanism for Abnormal Grain Growth in Thin Films on c-sapphire
Addressing the Stability and Reliability Challenges in Perovskite Solar Cells via Microstructural and Interfacial Tailoring
Anisotropic Interface Motion in Polycrystalline Films
Anisotropy of Electric Field Effects on Grain Boundary Core Structures
Blacklight Sintering of Ceramics
Characterization of Grain Boundary Phase Transformations
Charged Dislocations in Ionic Ceramics
Chemical Ordering Delays Grain Boundary Complexion Transitions in NbMoTaW
Cold-rolling of NiTiCu Shape Memory Alloys at Different Temperatures and Post-deformation Annealing and the Study of Interplay between Rolling Temperature, Microstructure, Mechanical and Physical Properties
Correlation Between Segregation Behaviors of Ca and Y Doping Atoms and Mechanical Properties in Magnesium Aluminate Spinel
Direct Observation of Anisotropic Growth of Nickel Oxide Nanostructure by the Terrace-ledge-kink Mechanism
Disordered Interfaces in Nanocrystalline Al-Ni-Ce: Origins of Microstructural Stability and Mechanical Performance
Elemental Segregation in Iron Strontium Titanate Solid Solutions
Examining Multiple Generations of Complexion Transitions in Eu-doped MgAl2O4
F-1: Understanding the Influence of Interfaces on the Texture Development in Mg-(Ca, Zn) Alloys during Recrystallization
Grain Boundary–property Relation in an Improper Ferroelectric Polycrystal
Grand Canonical Optimization of Symmetric Tilt Grain Boundary Structure in Hexagonal Close-packed Titanium
Highly Conductive Grain Boundaries in Cold Sintered BaZr0.7Ce0.2Y0.1O3-δ Proton Conductors
In-situ Air-free 4D-STEM Biasing of Model Lithium-sulfur Batteries
In-situ Measurement of Interfacial Energies at High Temperature Using Micromechanics and Microscopy
Influence of Ba Non-stoichiometry and Dopants on the Processing and Properties of Doped BaZrO3
Investigation of Grain Boundaries in SrTiO3: Correlation of Space Charge and Non-Arrhenius Grain Growth
Mixed Ionic Electronic Conduction Caused by Phase Transformation and Interfacial Segregation in an Entropy Stabilized Oxide
Modeling SiN Crystallization in Microelectronics Manufacturing Using Phase-field Method
Predicting Grain Boundary States and Transitions in Ferroelectrics
Predicting Interface Stability and Oxygen Vacancy Formation at Misfit Dislocations in CeO2/SrTiO3 Heterostructures
Segregation Engineering in Metal Oxide Nanoparticle-derived Ceramics
Structural Defects and Functional Interfaces in Epitaxial Thin Films of Complex Oxide Materials
The effects of large pores on grain growth behavior in calcia doped alumina
The Formation of Stacking Faults in Barium Zirconate Type Perovskites
The Role of Grain Boundary Stiffness during Grain Boundary Migration in Ni Polycrystals
Thermo-kinetic Analysis of Zinc Aluminate Nanoparticles Coarsening
Which Interfaces Matter Most? Variability in Grain Boundary Defect Chemistry and Conductivity in a Concentrated Solid Electrolyte

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