About this Abstract |
| Meeting |
2026 TMS Annual Meeting & Exhibition
|
| Symposium
|
Thin Films and Coatings: Properties, Processing and Applications
|
| Presentation Title |
Systematic Control of Crystallization and Phase Transformation Behavior of NiTi Films Using Cr, W and Cr-W Seed Layers |
| Author(s) |
Amirhossein Shafieizad, Axel Miranda, Jagannathan Rajagopalan |
| On-Site Speaker (Planned) |
Amirhossein Shafieizad |
| Abstract Scope |
NiTi thin films are widely used as sensors, actuators and switches in micro/nano-electro-mechanical systems (MEMS/NEMS) due to their shape memory and pseudoelastic behavior. In these applications, it is important to limit the deposition/annealing temperature of the NiTi films to ensure compatibility with the overall MEMS/NEMS fabrication process. Here, we introduce a novel method to systematically control the crystallization temperature of amorphous NiTi films by using Cr, W and Cr-W seed layers. Our experiments reveal that there is a strong correlation between the lattice matching of the seed layer with the nucleating NiTi phase (austenite) and the crystallization temperature. Furthermore, the seed layers also influence the transformation temperatures and type of transformation (austenite to martensite or austenite to R-phase to martensite), which can enable us to tune the properties of the NiTi films for specific applications. |
| Proceedings Inclusion? |
Planned: |
| Keywords |
Characterization, Phase Transformations, Thin Films and Interfaces |