| About this Abstract |
| Meeting |
2023 TMS Annual Meeting & Exhibition
|
| Symposium
|
Refractory Metals 2023
|
| Presentation Title |
Development of Ruthenium-Based Alloy Wire for Highly Efficient OLED Vacuum Deposition |
| Author(s) |
Rikito Murakami, Kei Kamada, Kenichi Umetsu, Shiika Itoi, Hiroaki Yamaguchi, Takashi Yoshioka, Katsunari Oikawa, Junji Kido, Akira Yoshikawa |
| On-Site Speaker (Planned) |
Rikito Murakami |
| Abstract Scope |
In deposition cells used for organic light-emitting diode (OLED) thin film deposition, Ta wires are commonly used, however, the low electrical resistivity and its high-temperature dependence have led to poor temperature controllability. In this study, Ru-Mo-W alloy wires were fabricated by the alloy-micro-pulling method (Alloy-μ-PD) and demonstrated to have higher heating efficiency, heating controllability, and high-temperature durability at 1600°C than conventional Ta wires. In addition, we demonstrated that the wire diameter was stably controlled to ±10 μm or less over 10 m in the crystal growth, and that the wire produced by the μ-PD method can function as a resistance heating wire. |
| Proceedings Inclusion? |
Undecided |
| Keywords |
High-Temperature Materials, Solidification, Environmental Effects |