**About this Abstract** |

**Meeting** |
**2020 TMS Annual Meeting & Exhibition
** |

**Symposium
** |
**Algorithm Development in Materials Science and Engineering
** |

**Presentation Title** |
Monte Carlo Studies of EBSPs Spectroscopy |

**Author(s)** |
Elena Pascal, Patrick Callahan, Saransh Singh, Marc De Graef |

**On-Site Speaker (Planned)** |
Elena Pascal |

**Abstract Scope** |
Pushing the angular resolution of electron backscatter diffraction (EBSD), commonly known as high angular resolution EBSD (HR-EBSD), has been yielding access to small elastic lattice strains information. However, the cross-correlation based approach to HR-EBSD assumes, and is limited to, a uniform electron energy distribution over the detector. Since the reflection geometry used in EBSD is not selected for this condition, the question of the true distribution and its impact on the accuracy limit of conventional indexing become critical. The energy and direction distribution of electrons in the SEM is commonly predicted from single scattering Monte Carlo models where the Bethe slowing down approximation renders the model easy to implement and fast to compute. Since computational power is no longer the limiting factor in explicit scattering modelling we will compare the similar predictions of the standard approach with the direct simulation model and the dielectric function MC implementations for EBSD geometry. |

**Proceedings Inclusion?** |
Planned: Supplemental Proceedings volume |