| Abstract Scope |
Piezoelectric MEMS is widely applied to inkjet heads, gyro, hard disk slider heads, etc. Key features of the piezoelectric MEMS integration of sensor and/or actuator element onto the thin MEMS structure. Based on the features, I have developed a uniquely designed self-sensitive resonant cantilevers, optical scanners, and self-amplification accelerometer. I have also developed ultra-thin piezoelectric MEMS technology, where only thin structure of piezoelectric MEMS is transferred onto flexible printed circuit substrate. Using the technology, I have developed a dynamic strain sensor array sheet for monitoring cracks in highway bridges. Recently, I have developing the ultra-thin piezoelectric MEMS for the application to speakers and haptics devices. |