ProgramMaster Logo
Conference Tools for 2021 TMS Annual Meeting & Exhibition
Login
Register as a New User
Help
Submit An Abstract
Propose A Symposium
Presenter/Author Tools
Organizer/Editor Tools
About this Abstract
Meeting 2021 TMS Annual Meeting & Exhibition
Symposium Advanced Functional and Structural Thin Films and Coatings
Presentation Title Highly Doped Si Metasurfaces Obtained by Coupling Top Down and Out of Equilibrium Approaches
Author(s) Jean-Marie Poumirol, Clément Majorel, Nicolas Chery, Meiling Zhang, Christian Girard, Nicolas Mallet, Filadelfo Cristiano, Peter Wiecha, Guilhem Larrieu, Sébastien Kerdiles, Anne-Sophie Royet, Pablo Acosta, Vincent Paillard, Caroline Bonafos
On-Site Speaker (Planned) Caroline Bonafos
Abstract Scope The appearance of LSPR in highly doped Si nanostructures opens a new field of applications, with Si-based plasmonic tunable over a wide infrared range. We propose a new approach consisting at optimizing the doping of thin silicon layers, by means of Laser Thermal Annealing, in which nanometer size disks are produced by low energy electron beam lithography. Hence, dense hexagonal arrays of 50 nm sized nanodisks have been obtained on phosphorus doped SOI wafers. Recrystallisation processes and P redistribution during LTA have been investigated by HREM and STEM-EDX. Active dopant concentration in the bulk SOI as high as 4 at. % have been deduced from Hall effect and FTIR measurements. Finally, intense and tunable (blueshift with the P content) far-IR LSPR have been observed in FTIR on the doped nanodisks metasurfaces in good agreement with Green Dyadic method predictions, revealing subtle effects linked to the underlying substrate and structuration.
Proceedings Inclusion? Planned:
Keywords Nanotechnology, Thin Films and Interfaces,

OTHER PAPERS PLANNED FOR THIS SYMPOSIUM

A Study on PMMA-copolymers Grafted onto Ti Using Advanced Chemistry Approach
Atomic Layer Deposition & Atomic Layer Etching – An Overview of Selective Processes
Biomimetic Calcium-deficient Hydroxyapatite Coating on Activated Carbon Fiber Cloth: A Dual Drug Delivery System
Calcium-phosphate Plasma Electrolytic Oxidation (PEO) Coatings on AZ31 Mg Alloy: Effects of Different Tricalcium Phosphate (TCP) Concentrations
Design of Innovative Hybrid Structures Using Grafting of Architecture-controlled Polymers for Biomedical Applications
Design of Ti-copolymer Sandwiches for Biomedical Implant to Improve Formability
Determining the Interaction between Porous Titanium and Adhesion of a Bioactive Coating
Development of a Laboratory Test to Identify Permanent PVD Coatings to Minimize Lubricant Use during Forging
Diamond-like Coatings: A Flexible Platform for Multifunctional Antibacterial Coatings for Health
Facile Synthesis of 3D Dendritic Gold Nanostructures Assisted by a Templated Growth Process: Application at the Detection of Traces of Molecules
Forming Limits and Shaping of Ti-PMMA-Ti Sandwiches for Biomedical Applications
Grafting of Bioactive Polymers with Various Architectures for Preparing Antibacterial and Biocompatible Surfaces
High-quality Diamond Films on Q-carbon Coated Austenitic Stainless Steels 304 and 316
Highly Doped Si Metasurfaces Obtained by Coupling Top Down and Out of Equilibrium Approaches
Interface Characteristics in Transparent Optical Nanomultilayers
Investigations on the Process Stability of Dry Deep Drawing with Volatile Lubricants Injected through Laser-drilled Microholes
Key Mechanical Test Methods to Characterize Optically Clear Adhesives
Laboratory-on-a Crystal for Multifunctional, Multiscale Testing of Thin Films
Localization of Dopants and Optical Properties of Phosphorus Doped Silicon Nanocrystals
Manipulating Polyolefin Performance by Control of Morphology through Processing
Metamaterial Coatings for Tuning Optical and Fluid Wetting Behavior
Molten Aluminum Test for the Identification of PVD Coating Candidates for Lube-free Aluminum Die Casting
Multi-photon Microfabrication: from Direct Laser Writing to 4D Microprinting
Multimodal Flexible Optoelectronic Devices for Colocalized Electrophysiology and Optophysiology
Nanoengineered Coating; Lotus Effect, Morphology, Contact Angles and Wettability
Nanomanipulation and Nanolithography Experiments on Mono- and Multilayer MoS2 Surfaces
Ni-Zn-Al2O3 Cermet Nanocomposite Coatings by High-pressure Cold Spraying
On the Controlled Antibacterial Activity of a Silver Oxide Doped Diamond-like Carbon Nanocoating With a Semi-permeable Polymeric Top Layer for Long-term Stability
Pulsed-laser Deposition and Optical Characterization of Gallium Oxide (Ga2O3) Thin Films
Silicone Breast Implants: Grafting of a Bioactive Polymer to Improve the Bio-integration
Simulation of Optical Properties for Multilayers from Extreme Ultraviolet to Far Infrared
Spin Coating of Doped-silica on Czochralski-Silicon for Enhanced Radiative Properties
Structural and Biological Properties of Silicon-incorporated Diamond-like Carbon Coatings
Studying Effects of Frequency on ZrTiO4/ZrO2 Nanocomposite Coatings on Ti–6Al–4V Alloys Produced by Plasma Electrolytic oxidation (PEO) Process
Temperature Dependence of Energy Gap in Semiconductors – Influence on Solar Cell Performance
TiN and DLC Coated Medical Grade Polyurethane (PUR) for Controlled Surface Degradation and Improved Mechanical Properties

Questions about ProgramMaster? Contact programming@programmaster.org