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Meeting 2024 TMS Annual Meeting & Exhibition
Symposium 2D Materials – Preparation, Properties, Modeling & Applications
Presentation Title Processing of 2D Transition Metal Dichalcogenide Semiconductors: Electrical Contacts and Atomic Layer Deposition
Author(s) Suzanne E. Mohney
On-Site Speaker (Planned) Suzanne E. Mohney
Abstract Scope Transition metal dichalcogenides (TMDs), such as MoS2, WS2, and WSe2, can be atomically smooth and are less than 1 nm thick in their monolayer form. These two-dimensional semiconductors are especially well-suited for short-channel transistors, energy-efficient devices for 3D integration, and flexible electronics. A key technological challenge is contacting them with low resistance. This presentation will review our group’s work on contacts to TMDs, including epitaxy of the metal on the semiconductor and the effect of metallization on the underlying TMD (e.g., creation of defects and doping). Another key challenge is the deposition of TMDs, especially at low temperatures suitable for the back end of the line for manufacturing computer chips. We will also present our experiences on atomic layer deposition of few-layer TMDs and other layered materials.
Proceedings Inclusion? Planned:

OTHER PAPERS PLANNED FOR THIS SYMPOSIUM

2D Amorphous Carbon Dielectric Prepared from Solution Precursor for Nanoelectronics
2D Materials in Photovoltaics – An Overview
A-1: Enhancing Gas Sensing Performance with 2D Material-integrated Sub-wavelength Grating Micro-ring Resonator: Improved Sensitivity and Selective Detection
A-2: Exploring Stability of WSe2 under Heavy Ion Irradiation
A New Phase of Silicon and Its Optical, Electrical, and Magnetic Properties
A Novel 2D van der Waals Phase-change Material Based on Transition-metal Binary Chalcogenide NbTe4
A Novel Solid Solution MXene with High Gravimetric Capacitance
Addressing Unmet Needs with 3D Printed Nanomaterials-based Electronics
An Overview of the Synthetic Route of Molybdenum Diselenide Nanoparticles
Chemical Vapor Deposition Synthesis of 2D Refractory Metal Carbides
Computational Investigation of MAX as Intercalation Host for Rechargeable Aluminum-ion Battery
Computational Search for van der Waals Layered Group-IV Monochalcogenides
Computational Study and Design of 2D MXenes for Applications Ranging from Metal-ion Batteries and Sensors to Membranes for Removal of Metal Ions
Computationally Guided Synthesis of MXenes by Dry Selective Extraction
Controlling the Growth of Wafer-scale 2D Materials: A Computational Framework for MOCVD Synthesis
Decoupling Acceleration Energy and Ion Effects in Defect Production through Ion Irradiation of Substrate Supported MoS2
Direct Ink Writing of Graphene Based Solutions for Gas and Water Sensing Applications
Electro-chemo-mechanics of Two-dimensional Materials-based Energy Storage Systems
Exploring the Remarkable Gas Sensing Capability of Molybdenum Diselenide Nanoparticles
Extensive Study of Graphene Growth Mechanism on Supported Cu Films Using Cold Wall CVD and Perspective on Growth Mechanism of Graphene From Scaling Functions of Graphene Island Size Distribution
Graphene as a Bioscaffold for Musculoskeletal Tissue Engineering
Graphene Based Protective Coatings
High-throughput Ab-Initio Study of 2D Janus-bulk Material Heterostructures for Photocatalysis
Investigation of MoS2-coated NITINOL60 for Triboelements in Ultra-High Vacuum Environments
Manufacturing and Characterization of Hybrid 2D Foams/ High-temperature Epoxy Nanocomposites
Mechanism of II-IV Semiconductor 2D Growth Facilitated by Crystallographic Anisotropy in Growth Kinetics in Wet Solution
Multifunctional Graphene Nanoplatelet (GNP) - Boron Nitride Nanoplatelet (BNNP) Hybrid Foam Sensors for Harsh Environments
MXene-Based Surface Coatings for Efficient Antiviral Air filtration
Novel 2D Materials Generated through LASiS
Optimization of the Ultrasound Liquid Phase Exfoliation of Graphite by MHz Synchrotron X-ray Imaging and Multiphysics Modelling
Processing and Performance of 2D- and 3D- sensor Materials
Processing of 2D Transition Metal Dichalcogenide Semiconductors: Electrical Contacts and Atomic Layer Deposition
Quantifying Thickness and Defects in 2D Materials
Radioluminescence Response and Catalytic Activity of Lanthanide-based Nanocomposites Upon X-ray Excitation
Stability of Pseudocapacitive Energy Storage in Ti3C2Tx MXene in a Wide Temperature Range
Strain Engineering of 2D van der Waals Materials for Nano-electronic and Quantum Devices
Structural Distortions and Optoelectronic Properties of Charged Point Defects and Dopants in 2D Materials
Study of Contact Metals to Transition Metal Dichalcogenides
Synthesis and Characterization of 2D WSe2 and Triple Cation Perovskite Based Photoabsorbers
Synthesis and Characterization of Q-carbon Layer Growth on 3D Nanostructures
Synthesis and Characterization of Q-silicon
Synthesis and Characterization of Selenides and Hybrid Halide Perovskites for Nanodevices
The Transverse Stiffness of Ti3C2Tx MXene and the Role of Inter-layer Water using Sub-angstrom Resolution Nanoindentation
Theory of Mechanical Exfoliation of van der Waals Layered Materials
Thermal Oxidation of Monolayer WS2
Two-Dimensional Solution-processed Tungsten Diselenide’s Response to Nitrogen Gas Flow
Uniaxial Strain-induced Stacking Order Change in Trilayer Graphene
Well-defined 3D Printing of Titanium Carbide (Ti3C2Tx) MXene Nanosheets into Complex and Hierarchical Microarchitectures with High Aspect Ratio

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