| Abstract Scope |
This study optimizes indium tin oxide (ITO) thin films for perovskite solar cells using DC magnetron sputtering combined with in-situ rapid thermal annealing. A statistical design of experiments approach was employed to investigate the effects of deposition power, oxygen flow, and annealing conditions on sheet resistance and optical transmission. The optimized ITO films achieved a sheet resistance of 13 Ω/□ at a thickness of 150 nm, corresponding to a resistivity of 195 μΩ·cm, with over 95% optical transmission. Structural characterization using atomic force microscopy, X-ray diffraction, and transmission electron microscopy revealed smoother surfaces, polycrystalline structures with dominant (222) orientation, and detailed grain boundary morphology. The films exhibited stoichiometry close to that of the ITO target, as indicated by energy-dispersive X-ray spectroscopy. Annealing significantly improved crystal quality, leading to reduced resistivity and enhanced optical properties. These results demonstrate the capability of advanced sputtering to produce high-quality ITO films for photovoltaic applications. |