About this Abstract |
| Meeting |
2027 TMS Annual Meeting & Exhibition
|
| Symposium
|
2D Materials – Preparation, Properties, Modeling & Applications
|
| Presentation Title |
Carbon Enabled High Performance Dielectrics for Nanoelectronics |
| Author(s) |
Congjun Wang |
| On-Site Speaker (Planned) |
Congjun Wang |
| Abstract Scope |
The atomically smooth surfaces of two-dimensional (2D) nanomaterials minimize scattering-induced carrier-transport degradation. However, this same attribute poses a major challenge for integrating 2D materials with high-quality dielectrics at sub-nanometer equivalent oxide thickness (EOT) through direct growth. We show that atomically thin carbon dots prepared from coal feedstocks assemble into a closely packed monolayer on 2D materials without hybridizing with the underneath 2D channels. This atomically thin assembly forms a van der Waals interfacial layer that enables deposition of ultrathin high-κ oxides to afford a hybrid dielectric with an EOT down to 0.6±0.1 nm, leakage current density below 10^-4 A/cm2, and a breakdown field of 28 MV/cm. Leveraging this approach, we fabricate top-gated MoS2 transistors with a subthreshold swing of 60 mV/dec, hysteresis below 30 mV, near-zero threshold voltage (VT) for enhancement-mode operation, and excellent bias-stress stability with VT drift under 25 mV. |
| Proceedings Inclusion? |
Planned: |
| Keywords |
Electronic Materials, Nanotechnology, |