About this Abstract |
| Meeting |
2026 TMS Annual Meeting & Exhibition
|
| Symposium
|
Functional Nanomaterials: Functional Low-Dimensional (0D, 1D, 2D) Materials 2026
|
| Presentation Title |
Vapor-Synthesized Organic–Inorganic Hybrid Thin Films for Extreme Ultraviolet (EUV) Lithography |
| Author(s) |
Chang-Yong Nam |
| On-Site Speaker (Planned) |
Chang-Yong Nam |
| Abstract Scope |
The success of current and future semiconductor device scaling toward the angstrom era critically depends on extreme ultraviolet (EUV) lithography, with EUV photoresists representing one of the key material challenges. In this talk, I will provide an overview of recent progress in organic–inorganic hybrid EUV photoresists synthesized via atomic layer deposition techniques, including vapor-phase infiltration (VPI) and molecular layer deposition (MLD), as well as a future perspective on the field over the coming decades. |
| Proceedings Inclusion? |
Planned: |
| Keywords |
Composites, Thin Films and Interfaces, Electronic Materials |