About this Abstract |
| Meeting |
MS&T25: Materials Science & Technology
|
| Symposium
|
Manufacturing and Processing of Advanced Ceramic Materials
|
| Presentation Title |
Signal analysis during micro hole drilling process on single crystal silicon for semiconductor device fabrication process |
| Author(s) |
Hwa-Sub Lee, Jun Sae Han, Doo-Sun Choi, Eun-Ji Gwak |
| On-Site Speaker (Planned) |
Hwa-Sub Lee |
| Abstract Scope |
High-hardness ceramic materials such as single-crystal silicon are widely used in semiconductor fabrication, especially for shower heads in dry etching systems requiring uniform plasma distribution through numerous micro-holes. These holes can be created via laser machining, etching, or micro-drilling. Micro-drilling is advantageous for its precise control over hole geometry due to direct tool-material interaction. However, the hardness of ceramics leads to tool wear, degrading surface quality. This study investigates acoustic emission (AE) signal analysis for monitoring tool condition during micro-drilling. AE signals recorded during machining were compared with surface defect observations, showing a correlation between certain frequency components and damage. The results suggest that AE-based monitoring can contribute to maintaining surface integrity in precision micro-hole fabrication.
This work was supported by the Technology Innovation Programs (20018385, Development of standard model for robot-equipment digital manufacturing package for automobile/machinery/shipbuilding/aviation fields) funded by the Ministry of Trade & Energy (MOTIE, Korea). |