About this Abstract |
| Meeting |
MS&T25: Materials Science & Technology
|
| Symposium
|
Lightweight Composites, Materials & Alloys
|
| Presentation Title |
High-Precision Thermophysical Property Database for Aluminum Alloys in Semiconductor Applications |
| Author(s) |
Zhi Liang, Ursula R. Kattner, Fan Zhang |
| On-Site Speaker (Planned) |
Zhi Liang |
| Abstract Scope |
Achieving high-precision control of thermophysical properties is critical for semiconductor manufacturing, where material property changes during performance directly impacts yield and reliability. CALPHAD-type phase- and microstructure-based models and databases provide a robust and efficient framework for predicting material properties and guiding the development of new materials. However, the accuracy of these models depends on high-precision experimental data and semiconductor-related scenarios need ultra-high precisions. This work, funded by a CHIPS Act program, aims to generate high-precision thermophysical measurements and construct a CALPHAD-based database for aluminum alloys, a substrate material for semiconductor chemical mechanical planarization (CMP) applications. This presentation will highlight our initial efforts in measurement planning, model development, and database construction to support industrial applications. |