About this Abstract |
| Meeting |
2027 TMS Annual Meeting & Exhibition
|
| Symposium
|
Advances in Surface Engineering IX
|
| Presentation Title |
TiNbZrMo Multi-Principal-Element Alloy Coatings on Silicon and SUS420 Stainless Steel |
| Author(s) |
Hao-Chin Lee, Kuan-Ting Chen, Tsai-Fu Chung |
| On-Site Speaker (Planned) |
Hao-Chin Lee |
| Abstract Scope |
TiNbZrMo multi-principal-element alloy coatings are deposited on silicon and SUS420 stainless steel substrates by direct-current magnetron sputtering. The influence of deposition conditions and post-deposition annealing on coating morphology, surface roughness, residual stress, and tribological performance is systematically investigated. Surface and cross-sectional morphologies are examined by scanning electron microscopy, while atomic force microscopy is used to quantify nanoscale topography and roughness. Residual stress is evaluated to clarify its relationship with coating integrity and delamination behavior. Wear resistance and friction behavior are assessed using ball-on-disk testing. By correlating microstructural features, surface characteristics, stress state, and wear response, this study aims to establish processing–structure–property relationships and identify suitable conditions for producing adherent and wear-resistant TiNbZrMo coatings on SUS420 stainless steel. |
| Proceedings Inclusion? |
Planned: |
| Keywords |
Thin Films and Interfaces, Surface Modification and Coatings, |