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Meeting 2026 TMS Annual Meeting & Exhibition
Symposium Printed Electronics and Additive Manufacturing of Advanced Functional Materials and Devices—From Processing Concepts to Applications
Presentation Title Bilayer Molybdenum Disulfide Strain Controlled Field Effect Transistor
Author(s) Cengiz Ozkan
On-Site Speaker (Planned) Cengiz Ozkan
Abstract Scope Silicon nitride stress-capping layers are pivotal in the semiconductor industry for their role in enhancing electron mobility and driving currents in n-channel silicon MOSFETs. We describe the effects of silicon nitride-induced strain on the electronic properties of bilayer-Molybdenum-Disulfide (MoS2), a promising two-dimensional semiconductor. We first examine the modifications in photoluminescence and Raman spectra of bare bilayer MoS2 under strain. By depositing a silicon nitride stress liner on a bilayer MoS2 field effect transistor (FET), which impacts both the gate and the source-drain regions, we replicate the stress conditions akin to those experienced in silicon MOSFETs. This approach enables us to comprehensively study the evolution from back-gated to top-gated, and ultimately, to strain-gated FET configurations. Our findings indicate that tensile strain crucially modifies the electronic structure of MoS2, primarily reducing the indirect band gap. Performance evaluations of the FETs demonstrate a marked increase in electron-mobility and on-current in the strain-gated configurations.
Proceedings Inclusion? Planned:
Keywords Electronic Materials, Nanotechnology, Thin Films and Interfaces

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