| Abstract Scope |
Present-day semiconductor manufacturing demands that a wide variety of engineering materials work as intended under stringent processing and operational conditions. While handbook properties were sufficient for product design many years ago, continued progression of Moore's Law has resulted in stark differences in the properties of what are considered bulk versus nanostructured materials. Design of reliable devices made up of engineered material systems at the nanometer scale, including elemental and compound semiconductors, 2D materials, organics, dielectrics, and metals, as well as their complex interactions, requires physics-informed structure and property data that are generated by state-of-the-art material measurements. In this presentation, I provide examples of rigorous metrology approaches currently in development to ensure a vibrant semiconductor manufacturing industry in the U.S. As a program manager in the CHIPS R&D Office, I based many of our investment decisions on the strong foundation of materials research I learned under Bill Gerberich’s tutelage. |