About this Abstract |
| Meeting |
2024 TMS Annual Meeting & Exhibition
|
| Symposium
|
Alloys and Compounds for Thermoelectric and Solar Cell Applications XII
|
| Presentation Title |
Si-based Planar-type Thermoelectric Generators |
| Author(s) |
Masahiro Nomura, Ryoto Yanagisawa |
| On-Site Speaker (Planned) |
Masahiro Nomura |
| Abstract Scope |
Thermoelectrics energy harvesting is one of the key technologies for carbon neutrality. This talk introduces recent advances in Si-based thermoelectric generators (TEGs) and we demonstrate a planar-type double-cavity Si TEG with phononic nanostructures based on a phonon-engineered design. The planar-type device was fabricated in an SOI wafer with CMOS and MEMS processes so that the device could be largely integrated. By using phononic nanostructures and three-dimensional thermal design, we achieved over 100 microWcm-2 output power density at a temperature difference of lower than 10 K. |
| Proceedings Inclusion? |
Planned: |
| Keywords |
Energy Conversion and Storage, Nanotechnology, |