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Meeting 2026 TMS Annual Meeting & Exhibition
Symposium Advances in Surface Engineering VIII
Presentation Title D-7: Thick Uniform Coatings on Hollow Glass Microspheres via DC Magnetron Sputtering
Author(s) Kira Shulman, David J. Ross, Victor P. Siller, Daniel J. Rodriguez
On-Site Speaker (Planned) Kira Shulman
Abstract Scope A vibrating stage assembly was developed to agitate hollow glass microspheres (HGM) of varying diameters to produce thick uniform coatings using magnetron sputtering. The vibrating stage assembly provides the linear mechanical agitation necessary to allow for optimal intermixing of the HGM, resulting in increased uniformity of the coatings. Longer coating periods and minimizing the distance from sputter source to substrate ensured development of thicker coatings. A 12-hour coating run with source-substrate distance of 6 inches produced 150 nm vanadium coatings on 25-28 um HGM, while a 10-hour coating run with source-substrate distance at 3.5 inches resulted in 400 nm tungsten coatings on 32-38 um HGM. Analysis of this data confirms that linear agitation and fine-tuning sputter coating parameters does support uniformity and ensures thick coatings on HGM. While these are promising results, this system can only maintain high uniformity and thickness when coating small batches of HGM at a time.
Proceedings Inclusion? Planned:

OTHER PAPERS PLANNED FOR THIS SYMPOSIUM

D-7: Thick Uniform Coatings on Hollow Glass Microspheres via DC Magnetron Sputtering
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