About this Abstract |
| Meeting |
2026 TMS Annual Meeting & Exhibition
|
| Symposium
|
Characterization of Minerals, Metals and Materials 2026 - In-Situ Characterization Techniques
|
| Presentation Title |
Towards Absolute High angular Resolution EBSD by using a FIB ring-core as reference |
| Author(s) |
Tijmen Vermeij, Marcos Rodriguez Sanchez, Luca Palmeira Belotti, Johan Hoefnagels |
| On-Site Speaker (Planned) |
Tijmen Vermeij |
| Abstract Scope |
For more than 10 years, researchers in the field of High angular Resolution EBSD (HR-EBSD) have intensely worked on advancing relative elastic strain measurements towards the ambitious goal of acquiring absolute elastic strains at high resolution. While simulation-based HR-EBSD and non-simulation-based full-field HR-EBSD have shown potential, the use of an experimental stress-free reference pattern is still preferred, although these are not trivially acquired. In this work, we explore the use of a stress-free reference point obtained by creating a so-called ‘Ring-core’ (stress-free pillar) using Focused Ion Beam (FIB) milling, followed by dedicated preparation steps for removal of FIB damage and redeposition. Using commercially available software for relative HR-EBSD, EBSD patterns outside the ring-core are correlated to a reference pattern inside the stress-free pillar of the ring-core. This method shows great promise and is validated using a home-built quasi in-situ setup for controlled bending of silicon wafers. |
| Proceedings Inclusion? |
Planned: |
| Keywords |
Characterization, Mechanical Properties, Other |