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Meeting MS&T26: Materials Science & Technology
Symposium Controlled Synthesis, Processing, and Applications of Structural and Functional Nanomaterials
Presentation Title Combinatorial Thickness-Graded Film Growth Via Substrate Tilt Geometry in Pulsed Laser Deposition
Author(s) Nirmal Singh, Michele Tunesi, Vikas Reddy Paduri, Don A Lucca, Ritesh Sachan
On-Site Speaker (Planned) Nirmal Singh
Abstract Scope Pulsed laser deposition is a promising technique for controlled thin film synthesis. When combined with combinatorial approaches, Pulsed laser deposition enables high-throughput experimentation for accelerated materials discovery. In this work, we present a reproducible combinatorial strategy for achieving spatially controlled thickness gradients using a substrate-tilt geometry. This approach exploits the angular distribution of the laser-induced plasma plume, creating variations in target-substrate distance and resulting in thickness gradients. Using boron nitride as a model system, we investigate the influence of substrate tilt on thickness distribution. Atomic force microscopy results show a uniform film over a 10 mm × 10 mm region at 0° tilt, whereas at ±20° tilt it shows a linear, asymmetric thickness gradient. The approach is further extended to additional thin-film systems to demonstrate reproducibility. A cosine-power plume model is used to simulate thickness profiles, showing good agreement with experiments and guiding combinatorial thin-film design.

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