About this Abstract |
| Meeting |
2026 TMS Annual Meeting & Exhibition
|
| Symposium
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Recent Advances in Electron Back-Scattered Diffraction and Related Techniques
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| Presentation Title |
Energy-Resolved Measurement of Backscattered Electrons in EBSD Using a Monolithic Direct Electron Detector |
| Author(s) |
Nicolo Della Ventura, Kalani Moore, McLean Echlin, Matthew Begley, Tresa Pollock, Marc De Graef, Daniel Gianola |
| On-Site Speaker (Planned) |
Nicolo Della Ventura |
| Abstract Scope |
We present an energy-resolved EBSD technique enabled by a MAPS-based direct electron detector (DED) that leverages an electron counting algorithm. This approach enables the detection and energy quantification of individual backscattered electrons (BSEs), providing unprecedented insight into the spectral characteristics of EBSD patterns. Using a calibrated 12 keV primary beam on Si(100), we observe a broad BSE energy distribution ranging from 3 to 14 keV, along with a vertical gradient in the weighted average electron energy across the detector, consistent with Monte Carlo simulations. Pixel-resolved energy maps reveal spectral modulations at Kikuchi band edges, particularly in the {110} bands, offering insights into the backscattering process. Selective energy filtering is employed to enhance pattern clarity and spatial resolution. Notably, applying a 2–8 keV filtering window under a 12 keV beam yields well-defined diffraction patterns, providing key insights into the energy range of electrons contributing to EBSD pattern formation. |
| Proceedings Inclusion? |
Planned: |
| Keywords |
Characterization, |