About this Abstract |
| Meeting |
2026 TMS Annual Meeting & Exhibition
|
| Symposium
|
Environmentally Assisted Cracking: Theory and Practice
|
| Presentation Title |
Laser Induced Fracturing via In-Situ Scanning Transmission Electron Microscopy (STEM) |
| Author(s) |
Davis Michael, Hojun Lim, Paul Kotula, Carlos Chacon, Edwin Chiu, Aashique Rezwan, Tesia Janicki, J. Matthew D. Lane, Christopher Bishop, Khalid M Hattar |
| On-Site Speaker (Planned) |
Davis Michael |
| Abstract Scope |
Thin film amorphous silicon nitride (a-Si₃N₄) is commonly used throughout microelectronics and microelectromechanical systems (MEMS) for its exceptional mechanical strength, thermal stability, and chemical inertness. However, stability under rapid elevated temperatures and repeated thermal cycling can induce instantaneous crystallization and fracture. This study employs in-situ transmission electron microscopy (TEM) coupled with laser heating to investigate such extreme environments using a high power 1064nm laser for ultra-high precision heating. Initial results indicate that internal stress remains a principal driving force for this instantaneous crystallization and fracture, although the specific cause for this stress remains a subject of study. This presentation will highlight recent efforts conducted at The Tennessee Ion Beam Materials Laboratory in deconvoluting the resulting fracture mechanics and kinetics during instantaneous crystallization and fracture. SNL is managed and operated by NTESS under DOE NNSA contract DE-NA0003525. |
| Proceedings Inclusion? |
Planned: |
| Keywords |
Characterization, Thin Films and Interfaces, Environmental Effects |