About this Abstract |
| Meeting |
2027 TMS Annual Meeting & Exhibition
|
| Symposium
|
Computational Thermodynamics and Kinetics
|
| Presentation Title |
Efficient Phase-Field Modeling of Thin-Film Texture Evolution via Interface-Selective Anisotropy |
| Author(s) |
YUNSU CHOI, Yongwoo Kwon |
| On-Site Speaker (Planned) |
YUNSU CHOI |
| Abstract Scope |
Preferred crystallographic orientation (texture) in polycrystalline thin films on amorphous substrates strongly influences carrier transport in advanced devices such as 3D NAND channels, DRAM capacitors, and interconnect metals. Conventional phase-field models that incorporate orientation-dependent anisotropy at all interfaces are computationally expensive. Here, we present a simplified multi-order-parameter phase-field framework in which anisotropy is applied only at the film-substrate interface, while grain boundaries are treated as isotropic. Because the film-substrate interface primarily governs texture evolution, the proposed model captures the essential texture development induced by interfacial energy anisotropy while significantly reducing computational complexity. This streamlined framework provides an efficient and predictive approach for simulating texture evolution and guiding the design of textured thin films for semiconductor applications. |
| Proceedings Inclusion? |
Planned: |
| Keywords |
Modeling and Simulation, Thin Films and Interfaces, Computational Materials Science & Engineering |