About this Abstract |
| Meeting |
MS&T25: Materials Science & Technology
|
| Symposium
|
Hybrid Organic-Inorganic Materials for Alternative Energy
|
| Presentation Title |
Novel Organic-Inorganic Hybrid Thin Films for Energy-Efficient Future Microelectronics |
| Author(s) |
Chang-Yong Nam |
| On-Site Speaker (Planned) |
Chang-Yong Nam |
| Abstract Scope |
Modern microelectronics technology is facing unprecedented energy efficiency challenges, exacerbated by the rapid rise of artificial intelligence and its associated computational demands. To meet these challenges, continued extreme scaling of semiconductor devices and innovation in computing architectures are essential. In this talk, I will present our recent progress on the vapor-phase synthesis of novel organic–inorganic hybrid thin films using vapor-phase infiltration (VPI)—an organic–inorganic hybridization technique derived from atomic layer deposition (ALD). These hybrid thin films show promise as next-generation photoresists for extreme ultraviolet (EUV) lithography—a key technology for Angstrom-era semiconductor device scaling in the coming decades—and as switching media for memristors, which offer the potential for energy-efficient neuromorphic computing. |